Repair the Fiber Optic Temperature Sensor / Converter
Temperature Sensor-Optical Type
- Function: Be use to read temperature of ESC (Inner, Outer) chuck table by Optic Fibre, it’s not T.C.
- Tool Module: 300mm AMAT Etcher and LAM Ethcer
Top-View
Structure
Converter Module
Repair Requirement
S/N Check
Parts No Check
Disassembly
Failure Analysis
Damage
Parts Replacement
Final
Inspection
Service
Report
Repair Quality & Capability
