ROTARY UNION OVERHAUL

AMAT MIRRA MESA Equipment Parts

AMAT MIRRA MESA is a 200mm CMP equipment model with one of the most install base in the semiconductor market.
Here at Warde Technology, we supply a great range of AMAT MIRRA MESA equipment parts that aid engineers in the CMP process.

AMAT LK Reflexion Equipment Parts

AMAT MIRRA MESA is a 300mm CMP equipment models with one of the most install base in the semiconductor market.

Rotary Union Assembly Overhaul Program

  • Ebara And Amat 200mm And 300mm Types
  • Amat Mirra, Lk, Reflexion
  • Ebara 300, 300s, 300s2
  • 3,4,5 And 6 Zones Types

 Repair Process Flow Charts

Rotary Union Assembly Overhaul Program

  • Parts Records And Photographs
  • Dismantling
  • Cleaning
  • Graphite Polishing And Measurement
  • Consumable Parts Change
  • Assembly And Testing
  • Function Testing