Robot Overhaul

Business Line

Repair Performance

Serviceable Model (YASKAWA Robot)
1	AMAT	XU-RCM6801/6802
		XU-RCM6841/6842
		XU-RCM7220/7221
		XU-RCM7231
		XU-RC350S-J01
		XU-RC350D-1B06
2	Varian	XU-RCM350D-J03
3	Rudolph	XU-RC400M-D03
4	KLA-Tencor	XU-RCM9205/9206
5	AXCELIS	XU-RCM7410
5	AXCELIS	XU-RC350D-C03
6	WonikIPS	XU-RC820M-F01
7	TEL	XU-RC845M-XXX
8	TEL (FSI)	XU-RC350D-C03
9	LAM	XU-RCM4700
10	EBARA	All Robot Model
11	DNS	XU-RC350D-K01
11	DNS	XU-RC350D-CXX(D21)

Serviceable Model (KAWASAKI Robot)
1	3NS411B CMP	RBT	3NS411B-F001,F002,F003,F004
		CTRL	30C61E – ALL B Series
2	3NS410B CVD/ ETCH	RBT	3NS410B – B Series All Model
		CTRL	30C61B – ALL B Series C61C-B004
3	3NS511B WET	RBT	3NS511C – F001,F101,F003, F103,G003
		CTRL	30C61D – B021,B005 3061I – A005
4	3NS420B NANO	RBT	3NS420B
		CTRL	30C61E-B014
5	3NX510B CVD	RBT	3NX510B-D001
		CTRL	30C61H-A002
6	3NX540B ETCH	RBT	3NX540B-A301,A302,A303
		CTRL	30C65E-A001 30D60E-A007

Repair Models 2

AMAT, Varian-2

AMAT Endura Centura, EMAX+, Enabler, etc.

AT Model
(XU-RCM6801)
(XU-RCM6841)

AMAT, Varian-3

AMAT Vantage

BT Model
(XU-RCM7230)
(XU-RCM7231)

Repair Models 4

KLA-Tencor, Rudolph-1

KLA-Tencor
Spectra, Puma, Surfscan

(XU-RCM9205)
(XU-RCM9206)

KLA-Tencor, Rudolph-2

Rudolph
Xport, etc

M122
(XU-RC4400M-D03)

Repair Models 5

Axcelis

Axelis
HE3, Paradigm, OptimaHD

HE3 (XU-RCM7410) Opti
maHD (XU-RC350D-C03)

Repair Models 6

TEL, FSI-1

TEL Tactras
Vigus, Vesta

Vigus (XU-RC845M-A02)
Vesta (XU-RC85M-E00)

TEL, FSI-2

TEL ANTARES

M201E
(XU-RC350D-C03)

Repair Models 7

DNS SU-3100

IR Robot (XU-RC350D-K01)

Repair Models 9

LAM (Novellus) For 200mm

PEP3510

PEP (XU-RCM4700)

Repair Models 10

TEL For 200mm

Unity

VS2B

All Repairable Robot Lists 1

	Maker	Robot Type	Track	Model
1	Wonik IPS	XU-RC820M-F00 XU-RC820M-F01 XU-RC820M-G00	MAHA/Bluetain/AKRA	M124
2	TES		1400_SFEM
3	SEMES		NXD / Poly
4	Mattson		Paradigm / Suprema
5	GES		Platinum
6	Ulvac		Entron M1
7	PSK		Supra V/Evolite/Ecolite
8	AMAT	XU-RCM6800 XU-RCM6801	CENTURA ENDURA	AT Rev1
		XU-RCM6841	CENTURA ENDURA	AT Rev2
		XU-RCM7200 XU-RCM7230 XU-RCM7231	Vantage	BTv
		XU-RCM6402	OASIS	LINK2
		XU-RCM6420 XU-RCM6421 XU-RCM6422	OASIS	LINK4
		XU-RC400M-B03	PDC	PDC
		XU-RC350S-J01	CENTURA/ENDURA	M101
		XU-RC350D-C06	Vantage	M201

All Repairable Robot Lists 2

9	TEL	XU-RC845M-A**
		XU-RC845M-C**
		XU-RC845M-D**
		XU-RC820M-F**	TECTRAC	TEL Special
10	Sosul (LAM Reserchi)	XU-RCM4700 (200mm) XU-RC320M-A00	Extrema	PEP
		XU-RCM7410		T427
		XU-RCM7230		T428
		XU-RC350D0-C03		M201
11	Axcelis	XU-RCM7400 XU-RCM7410	PARADIGM XE	HE3
11	Axcelis	XU-RC350D-C03	OPTIMA	M201
12	Nano Semicon	XU-RCM400M	SORTER	M122

All Repairable Robot Lists 3

13	EBARA	XU-RCM53D0 XU-RSM4800 XU-RSM4820D XU-RCM4800 XU-RCM4901 XU-RCM9120	F-REX200 F-REX300S	EBARA Special
14	FSI	XU-RC350D-C03	ANTARES	M201
15	Varian (AMAT)	XU-RC3500D-J03	VIISta	M201+
16	세크론	XU-RC350S-C03 XU-RCM400M-D03		M101 M122
17	KLA Tencor	XU-RCM9205		Z524I

All Repairable Robot Lists 4

18	MIJUN	XU-RC820M-F00		M124
		XU-RC350D-U01		EFEM Robor
		XU-RC350D-SU01		Chamber Robor
19	ZEUS (SES)	XU-RC350D-U01		EFEM Robor
19	ZEUS (SES)	XU-RC350D-S01		Chamber Robor
20	Wacco	XU-RCM400M-D03		M122
21	MEMC	XU-RC350D		M201
22	Hitachi (KE)	XU-RC350D-Z01		M201
23	Novellus	XU-RCM4700	PEP	PEP
23	Novellus	XU-RCM6501	Siera	Siera
24	KC TECH	XU-RCM8120 XU-RC355S-A00 XU-RW520K-B00T		EFEM Robot CMP Robot
25	RUDOULP	XU-RCM400M-D03		M122
25	RUDOULP	XU-RC350D-C03		M201

All Repairable Robot Lists 5

26	KOREA TECH	XU-RCM400M-D03		M122
27	DNS	XU-RC615L-*** A02, A03, A04, A05, A06, A12, A22, A32 XU-RC615L-B02 XU-RC615L-C02	SU3000	CR
		XU-RC350D-*** C21, C22, C31, C32 C41, C61, C71, D21	SU3000	IR
		XU-RC625L-A02	SU3100	CR
		XU-RC350D-K01		IR
28	BLUE CODE	XU-RCM400M-D03		M122
29	CAMTEK	XU-RCM350D- **		M201
30	K & Company	XU-RCM400M-D03 XU–RC350D-C03		M122 M201