Business Line
Repair Performance
Serviceable Model (YASKAWA Robot) |
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1 | AMAT | XU-RCM6801/6802 | |||
XU-RCM6841/6842 | |||||
XU-RCM7220/7221 | |||||
XU-RCM7231 | |||||
XU-RC350S-J01 | |||||
XU-RC350D-1B06 | |||||
2 | Varian | XU-RCM350D-J03 | |||
3 | Rudolph | XU-RC400M-D03 | |||
4 | KLA-Tencor | XU-RCM9205/9206 | |||
5 | AXCELIS | XU-RCM7410 | |||
XU-RC350D-C03 | |||||
6 | WonikIPS | XU-RC820M-F01 | |||
7 | TEL | XU-RC845M-XXX | |||
8 | TEL (FSI) | XU-RC350D-C03 | |||
9 | LAM | XU-RCM4700 | |||
10 | EBARA | All Robot Model | |||
11 | DNS | XU-RC350D-K01 | |||
XU-RC350D-CXX(D21) |
Serviceable Model (KAWASAKI Robot) |
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1 | 3NS411B CMP | RBT | 3NS411B-F001,F002,F003,F004 | |||
CTRL | 30C61E – ALL B Series | |||||
2 | 3NS410B CVD/ ETCH | RBT | 3NS410B – B Series All Model | |||
CTRL | 30C61B – ALL B Series C61C-B004 | |||||
3 | 3NS511B WET | RBT | 3NS511C – F001,F101,F003, F103,G003 | |||
CTRL | 30C61D – B021,B005 3061I – A005 | |||||
4 | 3NS420B NANO | RBT | 3NS420B | |||
CTRL | 30C61E-B014 | |||||
5 | 3NX510B CVD | RBT | 3NX510B-D001 | |||
CTRL | 30C61H-A002 | |||||
6 | 3NX540B ETCH | RBT | 3NX540B-A301,A302,A303 | |||
CTRL | 30C65E-A001 30D60E-A007 |
Repair Models 2
Repair Models 4
Repair Models 5
Repair Models 6
Repair Models 7
Repair Models 9
Repair Models 10
All Repairable Robot Lists 1
Maker | Robot Type | Track | Model | ||
1 | Wonik IPS | XU-RC820M-F00 XU-RC820M-F01 XU-RC820M-G00 |
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MAHA/Bluetain/AKRA | M124 |
2 | TES | 1400_SFEM | |||
3 | SEMES | NXD / Poly | |||
4 | Mattson | Paradigm / Suprema | |||
5 | GES | Platinum | |||
6 | Ulvac | Entron M1 | |||
7 | PSK | Supra V/Evolite/Ecolite | |||
8 | AMAT | XU-RCM6800 XU-RCM6801 | ![]() |
CENTURA ENDURA | AT Rev1 |
XU-RCM6841 | ![]() |
AT Rev2 | |||
XU-RCM7200 XU-RCM7230 XU-RCM7231 |
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Vantage | BTv | ||
XU-RCM6402 | OASIS | LINK2 | |||
XU-RCM6420 XU-RCM6421 XU-RCM6422 |
LINK4 | ||||
XU-RC400M-B03 | PDC | PDC | |||
XU-RC350S-J01 | CENTURA/ENDURA | M101 | |||
XU-RC350D-C06 | Vantage | M201 |
All Repairable Robot Lists 2
9 | TEL | XU-RC845M-A** | ![]() |
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XU-RC845M-C** | |||||
XU-RC845M-D** | |||||
XU-RC820M-F** | TECTRAC | TEL Special | |||
10 | Sosul (LAM Reserchi) | XU-RCM4700 (200mm) XU-RC320M-A00 |
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Extrema | PEP |
XU-RCM7410 | T427 | ||||
XU-RCM7230 | T428 | ||||
XU-RC350D0-C03 | M201 | ||||
11 | Axcelis | XU-RCM7400 XU-RCM7410 |
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PARADIGM XE | HE3 |
XU-RC350D-C03 | ![]() |
OPTIMA | M201 | ||
12 | Nano Semicon | XU-RCM400M | SORTER | M122 |
All Repairable Robot Lists 3
13 | EBARA | XU-RCM53D0 XU-RSM4800 XU-RSM4820D XU-RCM4800 XU-RCM4901 XU-RCM9120 |
F-REX200 F-REX300S |
EBARA Special | |
14 | FSI | XU-RC350D-C03 | ![]() |
ANTARES | M201 |
15 | Varian (AMAT) | XU-RC3500D-J03 | ![]() |
VIISta | M201+ |
16 | 세크론 | XU-RC350S-C03 XU-RCM400M-D03 |
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M101 M122 |
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17 | KLA Tencor | XU-RCM9205 | ![]() |
Z524I |
All Repairable Robot Lists 4
18 | MIJUN | XU-RC820M-F00 | ![]() |
M124 | |
XU-RC350D-U01 | EFEM Robor | ||||
XU-RC350D-SU01 | Chamber Robor | ||||
19 | ZEUS (SES) |
XU-RC350D-U01 | EFEM Robor | ||
XU-RC350D-S01 | Chamber Robor | ||||
20 | Wacco | XU-RCM400M-D03 | M122 | ||
21 | MEMC | XU-RC350D | M201 | ||
22 | Hitachi (KE) | XU-RC350D-Z01 | M201 | ||
23 | Novellus | XU-RCM4700 | ![]() |
PEP | PEP |
XU-RCM6501 | Siera | Siera | |||
24 | KC TECH | XU-RCM8120 XU-RC355S-A00 XU-RW520K-B00T |
EFEM Robot CMP Robot |
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25 | RUDOULP | XU-RCM400M-D03 | ![]() |
M122 | |
XU-RC350D-C03 | ![]() |
M201 |
All Repairable Robot Lists 5
26 | KOREA TECH | XU-RCM400M-D03 | ![]() |
M122 | |
27 | DNS | XU-RC615L-*** A02, A03, A04, A05, A06, A12, A22, A32 XU-RC615L-B02 XU-RC615L-C02 |
SU3000 | CR | |
XU-RC350D-*** C21, C22, C31, C32 C41, C61, C71, D21 |
IR | ||||
XU-RC625L-A02 | SU3100 | CR | |||
XU-RC350D-K01 | ![]() |
IR | |||
28 | BLUE CODE | XU-RCM400M-D03 | ![]() |
M122 | |
29 | CAMTEK | XU-RCM350D- ** | ![]() |
M201 | |
30 | K & Company | XU-RCM400M-D03 XU–RC350D-C03 |
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M122 M201 |
Parts Stock
Robot Stock
- Yaskawa Robot & Control Box / Kawasaki Robot & Control Box