Megasonic Module:
- Mega liquid recirculation status monitor
• Reflexion : cannot detect flow
– Install the digital flow sensor at the pump outline end to detect the actual flow
• LK : can detect flow
LK
Reflexion
- Mega tank level status monitor
• Reflexion : open loop control
– Install Level Detection Optical Fiber module inside the tank wall to confirm liquid level height
• LK : cloose loop control
Optical Fiber
Optical Fiber
Sensor Position
Megasonic Module:
- Mega idle roller rotation status monitor
• Reflexion : cannot detect rotation
– Modify idle roller and add viewport, when present sensor starts, laser will determine the notch rotation
• LK : cannot detect rotation
As is
To
- Test simulation photos
The value of the feedback will be lower than the set value when turning to Notch
Brush Module:
- Brush chemical / DIW flow monitor
• Reflexion : open loop control
– Install the PFA turbo flow meter at the end of the pipe. When the solenoid valve is started, it detects whether the flow meter receives the value within the upper and lower limits
• LK : close loop control
System Construction:
