300 MM Fab | |||||
MODULE | TOOL | ITEM | OEM P/N | Model | PHOTO |
T.F. | AMAT- PRODUCER SE | MKS/ASTEX ASTRON-TM | 0920-00013 | FI20620 FI20120 FI26201 |
|
ASM | RPS 2L | 0190-71842 | AX7651/AX7650 AX7657/AX7851 | ||
AMAT HDP | MKS/ASTEX ASTRON RPS-3L | 0190-26744 0920-00092 |
AX7670 | ||
AMAT Producer Novellus HDP |
MKS/ASTEX ASTRON RPS 4L RPS 6L RPS 8L |
0920-01124 | FI80130/FI80131 FI80133 FI80132 |
||
AMAT HDP | AE RPS | 0190-13025 | 3151801 | ||
LAM(Novellus) HDP | MKS RPS 15L | AX7645RH-06 AX7645PS | 27-361-66600 | ||
AMAT Endura | COMDEL RF Generator | CDX 2500 | |||
AMAT Endura | COMDEL RF Generator | COMDEL RF Generator | CLX 2500 | ||
ETCH | AMAT-DPS II / LAM / PSK | Smart Power | FI20160 | FI20160 | |
MKS Magnetron Head 3KW | FI20162 FI20162-1 FI20162-3 | FI20162 FI20162-1 FI20162-3 |
|||
MKS Smart Match | FI20634 FI20606 | FI20634 FI20606 |
|||
MKS Smart Match | FI20163 | FI20163 | |||
AMAT | DAIHEN MW Smart Match 3KW(TUNER) |
SMA-30D | SMA-30D | ||
DAIHEN MW Magnetron Head 3KW | ATM-30A | ATM-30A | |||
DAIHEN MW GENERATOR 3KW | ATP-30B | ATP-30B | |||
CMP | AMAT- REFLEXION | KOLLMORGEN MOTOR | DDR-101A DDR-101B |
||
KOLLMORGEN DRIVER | CR06250 |