Location:
At Process Chamber below: By pass on both side of Pendulum Valve
Principle:
Use of Infra Red to detect the concentration of SiF4. When the concentration of SiF4 reach down to steady state, which is the End Point cut off point.
Actual Picture:
IREPD Original parts:
RMU (Remote Monitor Unit) :Endpoint monitoring device
Problem:
- Before repair
- After repair
- Repair Flow
- Re-zero Test
- Test Items
