| Products Photo |
Tool |
Products Name |
Warde P/N |
OEM P/N |
Materials |
| IMPLANT |
| AMAT |
 |
AMAT |
Moving Clip Assy |
MPS0742 |
9010-00119 |
PEEK+SUS |
 |
AMAT |
Pick Pad |
MPS0925 |
E17045252 |
Silicon+AL |
 |
AMAT |
Linear Board |
OTS0734 |
E17183220 |
SUS |
| axcelis |
 |
axcelis |
GUIDE(2) |
MPS0980-1 |
|
Vespel |
 |
axcelis |
GUIDE(1) |
MPS0980-2 |
|
Vespel |
 |
axcelis |
GUIDE(3) |
MPS0980-3 |
|
Vespel |
 |
axcelis |
FORK |
MPS0992 |
|
|
 |
axcelis |
Insulator Pef Screw |
OTS0549-1 |
170051560 |
PEEK |
 |
axcelis |
Insulator Pef Base |
OTS0549-2 |
170051550 |
PEEK |
 |
axcelis-pxe |
Guide Wafer holder |
MPS1045 |
17C6273 |
SCP5000 |
 |
Axcelis OXE |
ASSY VAC END EFFECTOR ADJUSTABLE |
MPS1039 |
110103860 |
|
|
|
|
|
|
|
| Varian |
 |
Varian |
ROBOT Z POSITION,JIG KIT E19306720(S1) |
MPS0983 |
|
AL |
 |
Varian beamline |
Vac 407 Fork |
MPS0987 |
|
SUS |
 |
Varian beamline |
pick pad |
MPS0925 |
|
PEEK |
 |
Varian |
Insulator Contact Spring |
OTS0503 |
|
PEEK |
 |
Varian |
Elevcham-window, door |
OTS0680 |
E17445140 |
|
 |
Varian HCS(amat) |
Beamline 檔板 |
OTS0620 |
E11399260 |
|
 |
Varian PLAD |
SCREW,SHC,4-40X 1/4″,PEEK MATE RIAL |
SWS0033 |
E45000579 |
|
 |
Varian PLAD |
PEEK SCREW ASSEMBLY |
OTS0554 |
E11405260 |
|
| DF |
| KLA |
 |
KLA |
ASSY FINGERED FORK 300MM W/PIVOT PADS |
MPS0977 |
0279533-000 |
SUS |
