IMPLANT PARTS REPAIR – WARDE TECHNOLOGY SINGAPORE PTE LTD

13.56MHz, 50Ω

Motor Current Check

Cone Leakage Test

High Pressure 40 psi Check

Cooling Loop Check 80 psi

Coil Pitch Checks

Resonator Exterior Check List

Check the following items by fill out the blank

Cavity Position	Resonator S/N		Cone S/N	Coil S/N

The description of failure mode or missing parts:
Signature by Nova Eng :		Date	Signature by Customer Eng:		Date

PR / PO#
Received Date :
Delivered Date:

Resonator組裝檢查及測試項目

Resonator S/N:

__________

Cone S/N:

__________

Coil S/N:

__________

零件更換項目:

項次	名　　稱	是否更換	Atcion
1	STANDOFF	Y □ N □
2	RF Contact Rings	Y □ N □
3	TIMING BELT METRIC	Y □ N □
4	O-RINGS	Y □ N □
5	RF probe (阻抗量測)	Y □ N □
6	Bellow (clean and Leaking check )	Y □ N □
7	Potentiometer (阻抗量測)	Y □ N □
8	Pulley (外觀檢測損壞)	Y □ N □
9	Bearing (潤滑)	Y □ N □
10	Feed thru (阻抗量測)	Y □ N □
11	Cone (clean and Leaking check)	Y □ N □
12	Electrode (外觀檢測)	Y □ N □
13	Coil (平整度確認, Pitch 確認)	Y □ N □

測試項目：

項次	測試內容	測試規格	測試數據
1	Resonating Frequency Check (Check if the 13.56 MHZ resonating point keep within 1mm to 22mm)	13.56MHz, ±500Hz	13.56 MHZ Resonating POS: _________mm
2	Resonating Resistor Check (Check if the 13.56 MHZ resonating point then resistor keep within 49Ω to 51Ω	50Ω, ±1Ω	50 Ω,±1 Ω _________Ω
3	Motor Driving Current Check (Motor driving current should be less than 300mA for both fully in or out)	<300mA	IN: _____mA OUT: _____mA
4	Potential Meter Reading Set (At 13.56MHZ, check if the resistance of potential meter is 5.5KΩ)	5.5K, ±0.5K	The resistance of potential meter reading ______Ω
5	Resonator Pressure Check (Fill in air pressure to 40psi and check if the pressure drop within 24 Hrs)	Non – leakage	Pressure : ______psi
6	Resonator Cooling loop Check (Fill in air pressure to 80psi and check if the pressure drop within 24 Hrs)	Non – leakage	Pressure : ______psi

4 axis DI

1521950 Terminal ELE DI

PD DI

Resonator DI

1521950 Terminal ELE DI

Using Axcelis’OEM parts
- motors/cable/bearing replace new
- We will test (wafer cycle 10000 pcs) in our Axcelis machine before shipping to customer