Etching Equipment Parts

What is Etching?

Etching is the process of chemically removing layers from a water surface during manufacturing. At Warde, we provide the etching equipment parts for engineers.

Etching Equipment Parts

Products Photo Tool Products Name Warde P/N OEM P/N Materials
ETCH
  Teflon Ring MPS0075 2201012 PTFE
  Center Pin MPS0038 2008628 PTFE
  Pin ECO Short Version EP-2010 2003690 PVDF
  Ring Mounting Screw SWS0002 810-423392-2 PI
  Teflon Plug MPS0191 PTFE
  Vespel Pad DPS CP-2012 20021-13733 PI
  SEZ上蓋板 MPS0320 PVC
  SEZ側檔板 MPS0315 PVC
  Lifter Stopper A (8K-ESC) EP-2011 PI
  Wafer Carrier MPS0046 PVDF
  刮刀 MPS0053 PEI
  蓋板組 MPS0087 PVC
Products Photo Tool Products Name Warde P/N OEM P/N Materials
ETCH
LAM
  LAM Robot Fork MPS0824 2306233-01(Unload)                2306232-01(Load) CERAMIC
  LAM Clip Retaining  SYM Door Washer OTS0068 713-048216-001
(Tech 0806-6999-0130)
PCTFE
  LAM POM Screw SWS0026 PCTFE
  LAM Scm,Plasma,Dual Gas MPS0619 713-012641-035 Vespel
  LAM Teflon Ring OTSB-0444 PTFE
  LAM Lam Versys Parts(300MM) MPS0706 PEEK
  LAM Guide Assy MPS0685 PEEK                         SUS304
  LAM Shower head Tool set MPS0668 PBI
  LAM                                       (SEZ DV38,DV34,) Reinforced Exccentric Pin MPS0734-1 2351444-02 PVDF/CFRP
  LAM(SEZ DV38,DV34) Zero Undercut Pin-D MPS0730 2362064-00 PVDF/CFRP
  LAM                                       (SEZ DV38,DV34,323) Reinforced Exccentric Pin MPS0734-2 PVDF
  LAM(SEZ DV38,DV34) 12 Pin conductive MPS0969 2346121-00/ 30090194 PVDF+CF
  LAM(SEZ DV38,DV34) DV-P DS12 Pin conductive MPS0974 2353279-00 PVDF+CF
  TEL SCCM Screw Pin Lock OTS0171 3D10-400387-11 PI
  TEL 305DRM CASE ORIFICE,HE GAS FLOW MPS0728 3D10-400444-11 PCTFE
  PSK Asher Baffle MPS0729 5170-06603-D AL
  AMAT Ceramic Ring MPS0738 CERAMIC
  Semitool Raider Pin MPS0701-1 PVDF
  Semitool Raider Pin MPS0701-2 RULON
  Semitool Raider Algmnt Pin(P) MPS0755-1 PVDF
  Semitool Raider Algmnt Pin(R) MPS0755-2 RULON
  Semitool Raider Pin Aut Lwr Rtr Max Vlm Max Auto 300mm MPS0717-1 219T0766-23 ETFE
  Semitool Raider Pin Lower Rtr Caps2 MPS0717-2 219T0826-01 ETFE
  Semitool Raider Retainer  LWR RTR&MGNTR Index CAP2 300mm MPS0786 111T1403-05 PP
  Semitool Raider Retainer Seal MPS0898 212T0263-11 UPE
  AMAT      Semitool Raider Up Rotor Cover Assembly(無斜孔) MPS1069-1 210T219-15
  AMAT      Semitool Raider Lower Rotor Cover Assembly(無斜孔) MPS0908/ MPS1069-2 210T0220-13
  AMAT      Semitool Raider Up Rotor Cover Assembly(有斜孔) MPS1069-3
  AMAT      Semitool Raider Lower Rotor Cover Assembly(有斜孔) MPS1069-4
  Semitool Raider Door Capsule II 300mm OTS0374 111T1406-09 PTFE
  Semitool Raider Liner Motor Shaft Capsule 2 300mm OTS0223 PVDF
  Semitool Raider PTFE
  Semitool Raider PTFE
  Semitool Raider PTFE
  Semitool Raider Cover Screw OTS0397 2329816-01 PCTFE
  Spec,Darp End Effector Pad S 300mm MPS0882 0190-12366 Vespel
  Guide Assy MPS0884 PEEK+CF
  Kensington Robot Kensington Robot Blade Wafer Guide(3軸) MPS0658 PEEK
  Kensington Robot Kensington Robot Blade Wafer Guide(5軸) MPS0659 PEEK
MATTSON
  MATTSON Paddle Long A3 MPS0806 303-05091-00 CERAMIC
  MATTSON KIT,FRU,9701-2988-01, ASYST/                     KIT,FRU,9701-2988-02,ASYST MPS0851 1010230/              1010229 PI/SUS
     MATTSON-A3 機器手臂前端襯墊 MPS0875-1 9701-3182-01
     MATTSON-A3 機器手臂後端襯墊 MPS0875-2 4002-9796-01
     MATTSON FORK MPS0982
TEL
  TEL Cleaner Wafer Guide Block MPS0840 PTFE
  TEL Cap,M5 SHUTTER MPS0744 3D10-404112-11 PTFE
  TEL-Vigus SCREW SET MPS0743 2L10-453589-11/            2L10-453590-11/  2L10-453591-11 PEEK/PVDF
  TEL-Vigus SCREW SET OTSA-1150 2L10-453805-11/             2L10-453809-11 AL