| 300 MM Fab | |||||
| MODULE | TOOL | ITEM | OEM P/N | Model | PHOTO |
| T.F. | AMAT- PRODUCER SE | MKS/ASTEX ASTRON-TM | 0920-00013 | FI20620 FI20120 FI26201 |
 |
| ASM | RPS 2L | 0190-71842 | AX7651/AX7650 AX7657/AX7851 | ||
| AMAT HDP | MKS/ASTEX ASTRON RPS-3L | 0190-26744 0920-00092 |
AX7670 |  |
|
| AMAT Producer Novellus HDP |
MKS/ASTEX ASTRON RPS 4L RPS 6L RPS 8L |
0920-01124 | FI80130/FI80131 FI80133 FI80132 |
 |
|
| AMAT HDP | AE RPS | 0190-13025 | 3151801 |  |
|
| LAM(Novellus) HDP | MKS RPS 15L | AX7645RH-06 AX7645PS | 27-361-66600 |  |
|
| AMAT Endura | COMDEL RF Generator | CDX 2500 |  |
||
| AMAT Endura | COMDEL RF Generator | COMDEL RF Generator | CLX 2500 |  |
|
| ETCH | AMAT-DPS II / LAM / PSK | Smart Power | FI20160 | FI20160 |  |
| MKS Magnetron Head 3KW | FI20162 FI20162-1 FI20162-3 | FI20162 FI20162-1 FI20162-3 |
 |
||
| MKS Smart Match | FI20634 FI20606 | FI20634 FI20606 |
 |
||
| MKS Smart Match | FI20163 | FI20163 |  |
||
| AMAT | DAIHEN MW Smart Match 3KW(TUNER) |
SMA-30D | SMA-30D |  |
|
| DAIHEN MW Magnetron Head 3KW | ATM-30A | ATM-30A |  |
||
| DAIHEN MW GENERATOR 3KW | ATP-30B | ATP-30B |  |
||
| CMP | AMAT- REFLEXION | KOLLMORGEN MOTOR | DDR-101A DDR-101B |
 |
|
| KOLLMORGEN DRIVER | CR06250 |  |
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